Semiconductor device and manufacturing method for the same

ABSTRACT

In a semiconductor substrate on which are formed an N-type MOS transistor and a P-type MOS transistor, the gate electrode of the N-type MOS transistor comprises a tungsten film, which makes contact with a gate insulation film, and the gate electrode of the P-type MOS transistor comprises a tungsten film, which makes contact with a gate insulation film, and the concentration of carbon contained in the former tungsten film is less than the concentration of carbon contained in the latter tungsten film.

CROSS-REFERENCE TO PRIOR APPLICATION

This application is based upon and claims the benefit of priority fromthe prior Japanese Patent Application No. 2005-107937, filed on Apr. 4,2005, the entire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device and amanufacturing method for the same, and more particularly to asemiconductor device comprising an N-type MOS transistor and a P-typeMOS transistor, which utilize conductor films in the gate electrodes,and to a manufacturing method for the same.

2. Description of the Related Art

Device downscaling has been pursued in order to achieve a higherperformance MOSFET (Metal Oxide Semiconductor Field Effect Transistor),and also the need to reduce power consumption has been increased inaddition to the device downscaling. In order to reduce powerconsumption, it is necessary to keep the threshold value of a transistorat a low value. Therefore, gate electrodes having different workfunctions have been used for N-type MOSFET and P-type MOSFET,respectively.

Generally speaking, polycrystalline silicon (polysilicon) is utilized inthe gate electrode of a transistor, and a low threshold value isachieved by doping impurities into the polysilicons, which are the gateelectrode of N-type MOSFET and P-type MOSFET, converting thesepolysilicons to n-type polysilicon and p-type polysilicon, respectively,and setting the work function of the respective polysilicons in theproximity of the conduction band and valence band.

However, in a gate electrode comprised of polysilicon, even if doping isdone in high concentrations so that the impurity concentration is at the10²⁰ cm⁻³ level, which is the solid solubility limit of a conductiveimpurity, because a depletion layer is formed on the gate electrodeside, gate capacitance decreases to that extent. Thus, when forming agate insulation film, it is necessary to make it approximately 0.5 nmthinner in anticipation of depletion layer gate capacitance, but thecurrent situation is such that it is difficult to make the gateinsulation film thinner due to the problem of gate leakage currentincrease caused by a gate insulation film tunnel current.

As measures for avoiding the problem, increasing the dielectric constantof the gate insulation film, and the utilization of metal gateelectrodes are being studied. Increasing the dielectric constant of thegate insulation film achieves the physical thickness of the gateinsulation film, and holds down tunnel current by replacing the gateinsulation film with a high dielectric layer. Recently, the developmentof materials for high dielectric gate insulation films has beenvigorously pursued, but these materials have yet to reach the pointwhere they can be considered as much reliable as the conventionalsilicon oxide layer, and it will still be some time before they can beapplied to actual devices.

The use of a metal gate electrode prevents the depletion of the gateelectrode by replacing the polysilicon gate electrode by metal one. Whena metal gate electrode is employed to maintain the threshold value ofthe transistor at a low value, a device is formed by using a metalhaving a work function in the vicinity of 4.0 eV, which is theconduction band of silicon, as the gate electrode material in an N-typeMOSFET, and using a metal having a work function in the vicinity of 5.1eV, which is the valence band of silicon, as the gate electrode materialin a P-type MOSFET (for example, refer to Japanese Laid-open Patent No.2000-31296 (corresponding U.S. Pat. No. 6,027,961) and JapaneseLaid-open Patent No. 2000-252371 (corresponding U.S. Pat. No.6,291,282)).

However, in a conventional device, which uses polysilicon for the gateelectrode, the formation of the gate electrodes of the N-type MOSFET andthe P-type MOSFET is carried out simultaneously, but in manufacturingthe device disclosed in Japanese Laid-open Patent No. 2000-31296(corresponding U.S. Pat. No. 6,027,961), the problem was that theformation of the respective gate electrodes was carried out separately,thereby greatly increasing the number of processes.

With the forgoing in view, it is an object of the present invention toprovide a semiconductor device and manufacturing method therefor, whichmakes possible the formation of metal gate electrodes having differentwork functions in a P-type MOSFET and an N-type MOSFET withoutsignificantly increasing the number of manufacturing processes.

BRIEF SUMMARY OF THE INVENTION

A semiconductor device related to a first aspect of the presentinvention comprises an N-type MOS transistor having a first gateelectrode comprising a first conductor film, which comes in contact withthe gate insulation film, and a P-type MOS transistor having a secondgate electrode comprising a second conductor film, which comes incontact with the gate insulation film, and which contains carbon in ahigher concentration than the concentration of carbon contained in theabove-mentioned first conductor film.

A manufacturing method of a semiconductor device related to a secondaspect of the present invention is a manufacturing method of asemiconductor device, on which are formed an N-type MOS transistor and aP-type MOS transistor, comprising the steps of forming a gate insulationfilm on a semiconductor substrate; forming a conductor film, whichconstitutes a gate electrode, on the above-mentioned gate insulationfilm, in accordance with a manufacturing method that uses an organicmaterial; forming an insulation film, which contains hydrogen, so as tocover at the least a part of the above-mentioned gate electrode of theabove-mentioned N-type MOS transistor; and heating the above-mentionedsemiconductor substrate, on which the above-mentioned insulation film isformed, in a non-oxidizing environment.

Another manufacturing method of a semiconductor device related to athird aspect of the present invention is a manufacturing method of asemiconductor device, on which are formed an N-type MOS transistor and aP-type MOS transistor, comprising the steps of forming a gate insulationfilm on a semiconductor substrate; forming a conductor film, whichconstitutes a gate electrode, on the surface of the above-mentioned gateinsulation film, in accordance with a manufacturing method that uses anorganic material; forming an insulation film so as to cover at the leasta part of the above-mentioned gate electrode of the above-mentionedP-type MOS transistor; and heating the above-mentioned semiconductorsubstrate, on which the above-mentioned insulation film is formed, in acombination of an oxidizing environment and a educing environment.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a simplified cross-sectional view illustrating a structure ofa semiconductor device related to a first embodiment of the presentinvention;

FIGS. 2A, 2B, 2C, 2D and 2E are cross-sectional views illustratingmanufacturing processes of a semiconductor device related to the firstembodiment of the present invention;

FIG. 3 is a C-V characteristic diagram showing the results of measuringthe voltage dependence of the capacitance of a transistor, which usestungsten in the gate electrode;

FIG. 4 is a simplified cross-sectional view illustrating a structure ofa semiconductor device related to a second embodiment of the presentinvention;

FIGS. 5A, 5B, 5C, 5D and 5E are cross-sectional views illustratingmanufacturing processes of a semiconductor device related to the secondembodiment of the present invention;

FIG. 6 is a simplified cross-sectional view illustrating a structure ofa semiconductor device related to a third embodiment of the presentinvention;

FIGS. 7A, 7B, 7C, 7D, 7E, 7F and 7G are cross-sectional viewsillustrating manufacturing processes of a semiconductor device relatedto the third embodiment of the present invention;

FIG. 8 is a simplified cross-sectional view illustrating a structure ofa semiconductor device related to a fourth embodiment of the presentinvention; and

FIGS. 9A, 9B, 9C, 9D and 9E are cross-sectional views illustratingmanufacturing processes of a semiconductor device related to the fourthembodiment of the present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENT

The embodiments of the present invention will be explained below byreferring to the figures.

First Embodiment

To begin with, a structure of a semiconductor device related to a firstembodiment of the present invention will be explained using FIG. 1. FIG.1 is a simplified cross-sectional view illustrating a structure of asemiconductor device related to a first embodiment of the presentinvention. As shown in FIG. 1, element-separating insulation layers 101a through 101 c, which delineate element regions, are formed on asilicon substrate 100 having a single-crystal crystalline structure.MOSFETs are formed in regions, which are separated by anelement-separating insulation film 101. In FIG. 1, the region separatedby the element-separating insulation film 101 a located on the left sideof the figure and the element-separating insulation film 101 b locatedin the center of the figure is an N-type MOSFET formation region, andthe region separated by the element-separating insulation film 101 blocated in the center of the figure and the element-separatinginsulation film 101 c located on the right side of the figure is aP-type MOSFET formation region.

A p-well 102 is formed inside the silicon substrate 100 of the N-typeMOSFET formation region. Also, a gate electrode 107 n comprisingtungsten (W) as a first conductor film is formed, with a gate insulationfilm 104 interposed, on the silicon substrate 100 of the N-type MOSFETformation region. Conversely, an n-well 103 is formed inside a siliconsubstrate 100 of a P-type MOSFET formation region. Also, a gateelectrode 107 p comprising tungsten (W) as a second conductor film isformed, with a gate insulation film 104 interposed, on the siliconsubstrate 100 of the P-type MOSFET formation region.

The concentration of carbon contained in the tungsten of gate electrode107 n is kept lower than the concentration of carbon contained in thetungsten of gate electrode 107 p, and this keeps the work function ofgate electrode 107 n lower than the work function of gate electrode 107p. For example, in the first embodiment, the work function of gateelectrode 107 n can be made about 0.8 eV lower than the work function ofgate electrode 107 p. For example, the work function of gate electrode107 n can be set at 4.1 eV, and the work function of gate electrode 107p can be set at 4.9 eV. In this case, because the N-type MOSFET has atungsten-comprised gate electrode 107 n, which has a work function inthe vicinity of 4.0 eV, which is the conduction band of silicon, and theP-type MOSFET has a tungsten-comprised gate electrode 107 p, which has awork function in the vicinity of 5.1 eV, which is the valence band ofsilicon, the transistor threshold value can be held to a low value, andpower consumption can be reduced. Further, since tungsten is used as thematerial of the gate electrodes 107 n, 107 p, gate electrode depletioncan be prevented.

A gate-sidewall insulation film 112 comprising a silicon nitride layer110 and a silicon oxide layer 111 is formed in the both sidewalls of therespective gate electrodes 107 n and 107 p. Further, source/draindiffusion layers 115, 116 are formed respectively inside the siliconsubstrate 100 at both sides of the respective gate electrodes 107 n and107 p. The source/drain diffusion layers 115, 116 have a LDD (lightlydoped drain) structure, and are formed from shallow diffusion layers108, 109 for which the impurity concentration is kept low, and deepdiffusion layers 113, 114 for which the impurity concentration is madehigh. Having the LDD structure suppresses the generation of hotelectrons. A nickel (Ni) silicide layer 117 is formed on the surface ofthe source/drain diffusion layers 115, 116.

A passivation layer 118 is formed on the surface of the siliconsubstrate 100 of the N-type MOSFET formation region and gate-sidewallinsulation film 112 so as to cover the gate electrode 107 n. Thepassivation layer 118 is a silicon nitride layer containing, forexample, hydrogen, and the in-layer hydrogen concentration is 1E+21cm⁻³. If the passivation layer 118 is an insulation film, which contains1E+21 cm⁻³ or more of hydrogen, it is not limited to a silicon nitridelayer, and, for example, can also be a silicon oxide layer containinghydrogen.

A first interlayer insulation film 119 is formed on the surface of thepassivation layer 118, which is formed on the silicon substrate 100 ofthe P-type MOSFET formation region, gate electrode 107 n, gate-sidewallinsulation film 112, and N-type MOSFET formation region. A contact plug120, which is electrically connected to the source/drain diffusionlayers 115, 116, and gate electrodes 107 n, 107 p, is embedded in thefirst interlayer insulation film 119. The contact plug 120, for example,utilizes a barrier metal comprising titanium (Ti) and titanium nitride(TiN), and a tungsten plug constituted by stacking tungsten layers.

The source/drain diffusion layers 115, 116, and a wiring layer 121,which is electrically connected to the gate electrodes 107 n, 107 p, areformed with the contact plug 120 interposed, on the first interlayerinsulation film 119 implanted. The wiring layer 121, for example, usesaluminum (Al) as the material. A second interlayer insulation film 122is additionally formed on the first interlayer insulation film 119 so asto cover the wiring layer 121.

Next, manufacturing processes of the semiconductor device describedhereinabove will be explained using FIGS. 2A through 2E. FIGS. 2Athrough 2E are cross-sectional views illustrating manufacturingprocesses of a semiconductor device related to the first embodiment ofthe present invention.

Firstly, as shown in FIG. 2A, element-separating insulation films 101 athrough 101 c are formed using STI (shallow trench isolation) technologyin regions other than the element formation regions on a siliconsubstrate 100, which has the crystalline structure of a single crystal.Next, a resist, which is not shown in the figure, is selectively formedon the silicon substrate 100 in regions other than the region in whichthe N-type MOSFET is to be formed. Using this resist as a mask, forexample, B⁺ ions are implanted in the region of the silicon substrate100 where the N-type MOSFET will be formed, after which, the resist isremoved via ashing. Next, a resist not shown in the figure, isselectively formed on the silicon substrate 100 in regions other thanthe region in which the P-type MOSFET is to be formed. Using this resistas a mask, As⁺ ions, for example, are implanted in the region of thesilicon substrate 100 where the P-type MOSFET will be formed, afterwhich, the resist is removed via ashing. Then, by subjecting the siliconsubstrate 100, in which impurities have been doped by means of ionimplantation, to high-temperature heat treatment, the p-well 102 and then-well 103, which are deep diffusion layers, are formed.

Next, a thin gate insulation film 104, such as a silicon oxide layer, isformed on the surface of the silicon substrate 100, for example, bythermal oxidation. Then, a 50 nm-thick tungsten layer 105, having a workfunction of 4.9 eV, is deposited on the gate insulation film 104 bychemical vapor deposition (hereinafter, referred to as CVD) using anorganic material as a source. In addition, a 50 nm-thick silicon nitridelayer 106, for example, is deposited on the tungsten layer 105 by CVD.

Next, a resist not shown in the figure is selectively formed on thesilicon nitride layer 106 only in the regions where the gate electrodesof an N-type MOSFET and a P-type MOSFET are to be formed. Then, afterperforming anisotropic etching of the silicon nitride layer 106 usingthe resist as a mask, the resist is removed by carrying out ashing. Inaddition, the tungsten layer 105 is subjected to anisotropic etching byusing as a mask the silicon nitride layer 106, which has beenselectively left only in the regions where the gate electrodes are to beformed, and, as shown in FIG. 2B, for example, gate electrodes 107 n and107 p, which have gate lengths of 30 nm, are formed. Then, a resist notshown in the figure is selectively formed on the gate insulation film104 of the P-type MOSPET, and using as masks this resist and the siliconnitride layer 106 on the gate electrode 107 n, As⁺ ions, for example,are implanted inside the silicon substrate 100 of the N-type MOSFETregion. Subsequent to removing the resist by ashing, a resist not shownin the figure is selectively formed on the gate insulation film 104 ofthe N-type MOSFET region, and using as masks this resist and the siliconnitride layer 106 on the gate electrode 107 p, B⁺ ions, for example, areimplanted inside the silicon substrate 100 of the P-type MOSFET region.In addition, the gate insulation film 104 and resist are removed fromregions other than the regions of the gate electrodes 107 n, 107 p byashing, and then the silicon substrate 100 is subjected to heattreatment for five seconds at a temperature, for example, of 800° C. toform shallow diffusion layers 108 and 109 in the silicon substrate 100.

Next, as shown in FIG. 2C, a silicon nitride layer 110 and a siliconoxide layer 111 are deposited, in that order, over the entire surface ofthe silicon substrate 100 using, for example, CVD, and thereafter, thesilicon nitride layer 110 and a silicon oxide layer 111 are etched backover the entire surface until the silicon substrate 100 is exposed, anda gate-sidewall insulation film 112 comprising the silicon nitride layer110 and a silicon oxide layer 111 is formed on both the sidewalls of therespective gate electrodes 107 n, 107 p. Then, a resist not shown in thefigure is selectively formed on the silicon substrate 100 of the P-typeMOSFET region, and using as masks the resist, the silicon nitride layer106 on the gate electrode 107 n, and the gate-sidewall insulation film112, P⁺ ions, for example, are implanted inside the silicon substrate100 of the N-type MOSFET region. After removing the resist by performingashing, a resist not shown in the figure is selectively formed on thesilicon substrate 100 of the N-type MOSFET region, and using as masksthe resist, the silicon nitride layer 106 on the gate electrode 107 p,and the gate-sidewall insulation film 112, B⁺ ions, for example, areimplanted inside the silicon substrate 100 of the P-type MOSFET region.In addition, after removing the resist via ashing, for example, bysubjecting the silicon substrate 100 to heat treatment at a temperatureof 1030° C., deep diffusion layers 113 and 114 are formed in the siliconsubstrate 100.

As described hereinabove, source/drain diffusion layers 115 and 116,which comprise respectively shallow diffusion layers 108, 109, andrespectively deep diffusion layers 113, 114, are formed in the siliconsubstrate 100 at both sides of the respective gate electrodes 107 n, 107p.

Then, for example, a roughly 10 nm nickel layer not shown in the figureis deposited over the entire surface of the silicon substrate 100, afterwhich the silicon substrate having the nickel layer deposited issubjected to heat treatment for 30 seconds at a temperature of 350° C.to make the nickel layer chemically react with the silicon substrate100. Next, after selectively removing the silicon substrate 100 andunreacted nickel layer by wet etching using, for example, a mixedsolution of sulfuric acid and oxygenated water, heat treatment isperformed for 30 seconds at 500° C. This forms a nickel silicide layer117 on the surface of the source/drain diffusion layers 115, 116.

Next, as shown in FIG. 2D, for example, a plasma CVD method is used, andan approximately 200 nm-thick silicon nitride layer comprising between1E21 cm⁻³ to 1E22 cm⁻³ of hydrogen is deposited over the entire surfaceof the silicon substrate 100 in a mixed gas environment of silane andammonia. Next, a resist not shown in the figure is selectively formed onthe silicon nitride layer of the N-type MOSFET region, and the siliconnitride layer is subjected to anisotropic etching using the resist as amask. Next, by removing the resist by ashing, a passivation layer 118 isformed on the surface of the silicon substrate 100 of the N-type MOSFETregion, the silicon nitride layer 106 on the gate electrode 107 n, andthe gate-sidewall insulation film 112 covering the gate electrode 107 n.In addition, heat treatment is performed in a non-oxidizing environment,such as a nitrogen environment, for between 30 minutes and one hour attemperatures, for example, between 350° C. and 500° C.

Here, the work function of the N-type MOSFET gate electrode 107 n, andthe work function of the P-type MOSFET gate electrode 107 p after heattreatment will be explained using FIG. 3. FIG. 3 is a C-V characteristicdiagram showing the results of measuring the voltage dependence of thecapacitance of a transistor, which uses tungsten in the gate electrode.FIG. 3 shows a C-V curve 201 of a transistor, which has been subjectedto heat treatment without covering the periphery of a gate electrodewith a silicon nitride layer containing hydrogen, and shows a C-V curve202 of a transistor, which has been subjected to heat treatment afterthe periphery of a gate electrode covering with a silicon nitride layercontaining around 1E21 cm⁻³ of hydrogen. The C-V curve 201 correspondsto the C-V characteristics of the P-type MOSFET in this embodiment, andC-V curve 202 corresponds to the C-V characteristics of the N-typeMOSFET in this embodiment. In FIG. 3, the flat-band voltage Vfb of theseC-V curves 201, 202 is +0.04V and −0.76V, respectively.

That is, performing heat treatment after covering the periphery of agate electrode with a silicon nitride layer containing hydrogen causesthe value of the Vfb to shift approximately −0.80V. This Vfb shift isbelieved to be caused by that the heat treatment combines the carboncontained inside the tungsten layer of the gate electrode with the largeamount of hydrogen contained inside the silicon nitride layer, forms achemical compound such as either CH₄ or C₂H₂, and eliminates thecompound. That is, in the electrode whose periphery is covered by theoxygen-containing silicon nitride layer, heat treatment can be said toreduce the concentration of carbon in the phase boundary with the gateinsulation film, causing the Vfb to shift approximately −0.80V.Furthermore, this same effect is achieved if the hydrogen concentrationinside the silicon nitride layer is not less than 1E21 cm⁻³.

The value of the flat-band voltage Vfb is a value that corresponds tothe work function of a gate electrode, and the gate electrode workfunction determined from the Vfb value of C-V curve 201 is 4.9 eV, andthe gate electrode work function determined from the Vfb value of C-Vcurve 202 is 4.1 eV. This means the work function of the P-type MOSFETgate electrode 107 p in the first embodiment is 4.9 eV, and the workfunction of the N-type MOSFET gate electrode 107 n in the firstembodiment is 4.1 eV. In other words, according to the presentinvention, it is possible to endow the gate electrodes 107 n, 107 p withdifferent work functions without using different electrode materials ineach one.

After making the work functions of the gate electrodes 107 n, 107 pdifferent by performing heat treatment as described hereinabove, forexample, as shown in FIG. 2E, CVD is used to deposit a first interlayerinsulation film 119 on the surface of the silicon substrate 100 of theP-type MOSFET formation region, the gate electrode 107 p, thegate-sidewall insulation film 112 covering the gate electrode 107 p, andthe passivation layer 118 formed in the N-type MOSFET formation region,and the surface is planarized using chemical-mechanical polishing(hereinafter, referred to as CMP). Next, the first interlayer insulationfilm 119 covering the top surface of the nickel silicide layer 117 onthe source/drain diffusion layers 115, 116, and the first interlayerinsulation film 119 and silicon nitride layer 106 covering the topsurface of the silicon nitride layer 106 on the gate electrodes 107 n,107 p are removed by anisotropic etching, and a contact pattern isformed. That is, the first interlayer insulation film 119 and siliconnitride layer 106 are subjected to anisotropic etching so as to exposefrom the bottom of the contact pattern the nickel silicide layer 117 onthe source/drain diffusion layers 115, 116, and the tungsten gateelectrodes 107 n, 107 p.

Then, for example, titanium, titanium nitride, and tungsten layers aredeposited in that order inside the contact pattern using the sputteringmethod. Next, CMP is used to planarize the surface of the firstinterlayer insulation film 119, and a contact pattern, inside whichcontact plugs 120 are embedded, is formed. Next, for example, aluminumis deposited on the first interlayer insulation film 119 using thesputtering melted, patterning is carried out in the desired shape usingphotolithography and dry etching, and a wiring layer 121 is formed. Thewiring layer 121 is formed so as to be connected electrically to eitherthe source/drain diffusion layers 115, 116, or the gate electrodes 107n, 107 p via the contact plugs 120. Finally, a second interlayerinsulation film 122 is deposited, for example, using CVD, on the firstinterlayer insulation film 119 so as to cover the wiring layers 120,121, and the surface is planarized using CMP. By doing so, thesemiconductor device shown in FIG. 1, comprising an N-type MOSFET madefrom a tungsten electrode with a work function of 4.1 eV, and a P-typeMOSFET made from a tungsten electrode with a work function of 4.9 eV, iscompleted.

Thus, in the first embodiment, because the same metal material is usedin the P-type MOSFET gate electrode 107 p and the N-type MOSFET gateelectrode 107 n, and their respective work functions are differentiatedby changing the concentrations of carbon contained in the gateelectrodes 107 p, 107 n, it is possible to form metal gate electrodeshaving different work functions for the P-type MOSFET and the N-typeMOSFET without significantly increasing the number of manufacturingprocesses.

Furthermore, in the first embodiment, tungsten is used as the materialof the gate electrodes 107 n, 107 p, but this material can be any metalmaterial with a work function of 4.8 eV or greater, for example,palladium (Pd), nickel (Ni), cobalt (Co), rhodium (Rh), iridium (Ir),molybdenum (Mo), antimony (Sb), bismuth (Bi), or can be an alloy ofthese.

Also, the gate insulation film 104 does not have to be a silicon oxidelayer resulting from thermal oxidation, and any insulation film having adielectric constant that is higher than the silicon oxide layer can beused, for example, an oxide of hafnium (Hf), zirconium (Zr), titanium(Ti), tantalum (Ta), aluminum (Al), strontium (Sr), yttrium (Y),lanthanum (La), or an compound oxide of any of these elements and asilicon, such as ZrSixOy. In addition, stacked layers of these oxidescan also be used.

Further, the passivation layer 118 is formed after forming thegate-sidewall insulation film 112 and nickel silicide layer 117, butthis passivation layer 118 can also be formed prior to forming thegate-sidewall insulation film 112, that is, in the state shown in FIG.2B. In order to prevent flocculation of the nickel silicide layer 117when the passivation layer 118 is formed after forming the nickelsilicide layer 117, a heat treatment for eliminating the carbon from thegate electrode 107 n is carried out at temperatures of less than 500°C., but when the passivation layer 118 is formed prior to forming thegate-sidewall insulation film 112, this heat treatment can be carriedout at a temperature of 500° C. or higher. Further, when the passivationlayer 118 is formed prior to forming the gate-sidewall insulation film112, it is necessary to remove the passivation layer 118 after heattreatment to enable the formation of the nickel silicide layer 117 in asubsequent process.

Second Embodiment

The structure of a semiconductor device in a second embodiment of thepresent invention will be explained using FIG. 4. FIG. 4 is a simplifiedcross-sectional view illustrating a structure of a semiconductor devicerelated to the second embodiment of the present invention. Since thestructural components other than the gate electrodes 304 n, 304 p, arethe same as those in the first embodiment, the structural components inFIG. 4 that are the same as those in FIG. 1 will be assigned the samereference numerals, and explanations thereof will be omitted.

In the first embodiment described hereinabove, the gate electrode 107 isformed using only a tungsten layer, but in the second embodiment, a gateelectrode 304 is formed by stacking a tungsten layer 301 and apolysilicon layer 302 having on its surface a nickel silicide layer 303,which is one of the metal silicides. More specifically, an N-type MOSFETgate electrode 304 n is formed by stacking a low-carbon-content tungstenlayer 301 n, and an n-type polysilicon layer 302 n having on its surfacea nickel silicide layer 303 and doped, for example, with phosphorous(P⁺), and a P-type MOSFET gate electrode 304 p is formed by stacking ahigh-carbon-content tungsten layer 301 p, and a p-type polysilicon layer302 p having on its surface a nickel silicide layer 303 and doped, forexample, with boron (B⁺).

Stacking the gate electrodes 304 n, 304 p like this makes it possible todifferentiate the respective work functions by adjusting the carboncontent of the tungsten layers 301 n, 301 p, in the same way as in thefirst embodiment, and enables the resistance of the gate electrodes 304n, 304 p to be lowered by virtue of the polysilicon layers 302 n, 302 phaving a nickel silicide layer 303 on their surfaces.

Next, the manufacturing process for the above-mentioned semiconductordevice will be explained using FIG. 5A through FIG. 5E. FIGS. 5A through5E are cross-sectional views illustrating manufacturing processes of asemiconductor device related to the second embodiment of the presentinvention.

First, as shown in FIG. 5A, element-separating insulation films 101 athrough 101 c are formed using STI in regions other than the elementformation regions on the silicon substrate 100. Next, a p-well 102 andan n-well 103 are formed in the regions of the silicon substrate 100where an N-type MOSFET and a P-type MOSFET are to be formed. Inaddition, a gate insulation film 104 is formed on the surface of thesilicon substrate 100.

Then, a 10 nm-thick tungsten layer 301, having a work function of 4.9eV, is deposited on the gate insulation film 104 by CVD using an organicmaterial as a source. A 90 nm polysilicon layer 302 is deposited, forexample, using CVD on the tungsten layer 301. Next, a resist not shownin the figure is selectively formed of the polysilicon layer 302 in theP-type MOSFET region, and, using this resist as a mask, for example, P⁺ions are implanted inside the polysilicon layer 302 of the N-type MOSFETregion. After removing the resist by ashing, a resist not shown in thefigure is selectively formed on the polysilicon layer 302 in the N-typeMOSFET region, and, using this resist as a mask, for example, B⁺ ionsare implanted inside the polysilicon layer 302 in the P-type MOSFETregion. Additionally, after removing the resist by ashing, a 50 nm-thicksilicon nitride layer 305 is deposited using, for example, CVD.

Next, as shown in FIG. 5B, a resist not shown in the figure isselectively formed on the silicon nitride layer 305 only in the regionswhere gate electrodes of an N-type MOSFET and a P-type MOSFET are to beformed. Then, using the resist as a mask, the silicon nitride layer 305is subjected to anisotropic etching, after which the resist is removedby ashing. In addition, using the silicon nitride layer 305, which hasbeen selectively left only in the regions where the gate electrodes willbe formed, as a mask, the polysilicon layer 302 and tungsten layer 301are subjected to anisotropic etching, after which the silicon nitridelayer 305 is removed, forming gate electrodes 304 n and 304 p.

Then, a resist not shown in the figure is formed on the gate insulationfilm 104 on the P-type MOSFET region, and, using this resist and thegate electrode 304 n as masks, As⁺ ions, for example, are implantedinside the silicon substrate 100 of the N-type MOSFET region. Afterremoving the resist via ashing, a resist not shown in the figure isselectively formed on the gate insulation film 104 of the N-type MOSFETregion, and, using this resist and the gate electrode 304 p as masks, B⁺ions, for example, are implanted inside the silicon substrate 100 of theP-type MOSFET region. Additionally, the resist is removed by ashing, andthen the silicon substrate 100 is subjected to heat treatment for fiveseconds at a temperature, for example, of 800° C. to form shallowdiffusion layers 108 and 109 inside the silicon substrate 100.

Next, as shown in FIG. 5C, a gate-sidewall insulation film 112, whichcomprises a silicon nitride layer 110 and a silicon oxide layer 111, isformed on the respective sidewalls of the gate electrodes 304 n, 304 p.Further, source/drain diffusion layers 115, 116 are formed respectivelyinside the silicon substrate 100 at both sides of the respective gateelectrodes 304 n, 304 p. The source/drain diffusion layers 115, 116 areformed from shallow diffusion layers 108, 109 and deep diffusion layers113, 114. The specific method for forming the gate-sidewall insulationfilm 112 and deep diffusion layers 113, 114 is the same as that of thefirst embodiment, which was explained using FIG. 2C.

Next, for example, after depositing an approximately 10 nm nickel layernot shown in the figure over the entire surface of the silicon substrate100 and polysilicon layers 302 n, 302 p, heat treatment is applied for30 seconds at a temperature of 350° C., causing the nickel layer and thesilicon substrate 100 to react chemically. Next, the silicon substrate100 and unreacted nickel layer are selectively removed by wet etchingusing, for example, a mixed solution of sulfuric acid and oxygenatedwater, after which heat treatment is performed for 30 seconds at 500° C.This forms nickel silicide layers 117 and 303 in a self-aligningcondition on the surfaces of the source/drain diffusion layers 115, 116,and the polysilicon layers 302 n, 302 p.

Next, as shown in FIG. 5D, a passivation layer 118 containing hydrogenis formed on the surface on the gate-sidewall insulation film 112, whichis covering the silicon substrate 100 on the N-type MOSFET formationregion, gate electrode 304 n, and gate electrode 304 p, and carbon iseliminated from the tungsten layer 301 n, which constitutes the gateelectrode 304 n, by applying heat treatment in a non-oxidizingenvironment, such as a nitrogen environment, for between 30 minutes andone hour at temperatures, for example, between 350 and 500° C. Thislowers the work function of the gate electrode 304 n from 4.9 eV to 4.1eV. The specific methods for forming the passivation layer 118 is thesame as that of the first embodiment, which was explained using FIG. 2D.

Finally, as shown in FIG. 5E, a first interlayer insulation film 119, acontact plug 120, a wiring layer 121, and a second interlayer insulationfilm 122 are formed the same as in the first embodiment, which wasexplained using FIG. 2E, and the semiconductor device shown in FIG. 4 iscompleted.

Thus, in the second embodiment, the same metal material, for example,tungsten, is used in the P-type MOSFET gate electrode 304 p and theN-type MOSFET gate electrode 304 n, and the gate electrodes 304 n, 304 puse a stacked structure of a tungsten layer 301, and a polysilicon layer302 having a nickel silicide layer 303 on its surface. This makes itpossible to differentiate the respective work functions by adjusting thecarbon content of the tungsten layers 301 n, 301 p without significantlyincreasing the number of manufacturing processes, in the same way as inthe first embodiment, and, in addition, it makes it possible to lowerthe resistance of the gate electrodes 304 n, 304 p owing to thepolysilicon layers 302 n, 302 p having a nickel silicide layer 303 ontheir surfaces.

Furthermore, in the second embodiment, in the same way as in the firstembodiment, the material for the gate electrodes 304 n, 304 p can be ametal other than tungsten, or can be an alloy as long as the workfunction of the metal material is 4.8 eV or greater. Also, the gateinsulation film 104 can make use of any insulation film having adielectric constant that is higher than the silicon oxide layer.Further, the passivation layer 118 can also be formed prior to thegate-sidewall insulation film 112, that is, it can be formed in thestate shown in FIG. 5B, and in this case, a heat treatment foreliminating carbon can be carried out at a temperature of 500° C. orhigher.

Third Embodiment

The structure of a semiconductor device in a third embodiment of thepresent invention will be explained using FIG. 6. FIG. 6 is a simplifiedcross-sectional view illustrating a structure of a semiconductor devicerelated to the third embodiment of the present invention. Since thestructural elements other than the gate electrodes 401 n, 401 p, and theinterlayer insulation films 402, 403, 404, for insulating the wiringlayers 121, the N-type MOSFET and P-type MOSFET are the same as those inthe first embodiment, the structural components in FIG. 6 that are thesame as those in FIG. 1 will be assigned the same reference numerals,and explanations thereof will be omitted.

In the first embodiment described hereinabove, the passivation layer 118is formed so as to cover the surfaces of the gate electrode 107 and thegate-sidewall insulation film 112, but in the third embodiment, thestructure is constituted such that a passivation layer 118 is formed ona first interlayer insulation film 402, which is formed up to the sameheight as the gate electrodes 401 n, 401 p on the silicon substrate 100,and the passivation layer 118 makes direct contact with the uppersurface of the gate electrode 401 n. Further, a second interlayerinsulation film 403 is formed so as to cover the passivation layer 118,and, in addition, a third interlayer insulation film 404 is formed so asto cover a wiring layer 121 formed on the surface of the secondinterlayer insulation film 403. That is, the first and second interlayerinsulation films 402, 403, in the third embodiment correspond to thefirst interlayer insulation film 119 in the first embodiment, and thethird interlayer insulation film 404 in the third embodiment correspondsto the second interlayer insulation film 122 in the first embodiment.

Next, the manufacturing process of the above-mentioned semiconductordevice will be explained using FIG. 7A through FIG. 7G. FIGS. 7A through7G are cross-sectional views illustrating manufacturing processes of thesemiconductor device related to the third embodiment of the presentinvention.

First, as shown in FIG. 7A, element-separating insulation films 101 athrough 101 c are formed using STI technology in regions other than theelement formation regions on the silicon substrate 100. Then, a p-well102 and an n-well 103 are formed in the regions of the silicon substrate100, where the N-type MOSFET and P-type MOSFET are to be formed.

Next, a silicon oxide layer 405 is formed on the surface of the siliconsubstrate 100 using, for example, thermal oxidation. In addition, a 100nm-thick polysilicon layer 406 is deposited on the silicon oxide layer405 using, for example, CVD, and a 100 nm-thick silicon nitride layer407 is deposited further on the polysilicon layer 406 using, forexample, CVD.

Next, as shown in FIG. 7B, a resist not shown in the figures isselectively formed on the silicon nitride layer 407 only in the regions,where the N-type MOSFET and P-type MOSFET gate electrodes are to beformed. Then, using the resist as a mask, the silicon nitride layer 407is subjected to anisotropic etching, after which the resist is removedby ashing. In addition, using as a mask the silicon nitride layer 407,which has been selectively left only in the regions where the gateelectrode are to be formed, the polysilicon layer 406 is subjected toanisotropic etching, and dummy gate electrodes 401 n′ and 401 p′ areformed.

Then, a resist not shown in the figure is selectively formed on thesilicon oxide layer 405 on the P-type MOSFET region, and, using thisresist and dummy gate electrode 401 n′ as masks, for example, As⁺ ionsare implanted inside the N-type MOSFET region of the silicon substrate100. After removing the resist by ashing, a resist not shown in thefigure is selectively formed on the silicon oxide layer 405 on theN-type MOSFET region, and, using this resist and dummy gate electrode401 p′ as masks, B⁺ ions, for example, are implanted inside the P-typeMOSFET region of the silicon substrate 100. In addition, after removingthe resists by ashing, shallow diffusion layers 108 and 109 are formedinside the silicon substrate 100 by performing heat treatment for fiveseconds at a temperature, for example, of 800° C.

Next, as shown in FIG. 7C, a gate-sidewall insulation film 112, whichcomprises a silicon nitride layer 110 and a silicon oxide layer 111, isformed on both the sidewalls of the respective dummy gate electrodes 401n′, 401 p′. Further, source/drain diffusion layers 115, 116 arerespectively formed inside the silicon substrate 100 at both sides ofthe respective dummy gate electrodes 401 n′, 401 p′. The source/draindiffusion layers 115, 116 are formed from shallow diffusion layers 108,109 and deep diffusion layers 113, 114. In addition, a nickel silicidelayer 117 is formed on the surface of the source/drain diffusion layers115, 116. The specific methods for forming the gate-sidewall insulationfilm 112, deep diffusion layers 113, 114, and nickel silicide layer 117are the same as those of the first embodiment, which has been explainedusing FIG. 2C.

Next, as shown in FIG. 7D, a first interlayer insulation film 402 isdeposited over the entire surface of the silicon substrate 100 using,for example, CVD. Then, using, for example, CMP, the first interlayerinsulation film 402 is polished until the surface of the polysiliconlayer 406 is exposed, and the surface of the first interlayer insulationfilm 402 is planarized.

Next, the polysilicon layer 406 is stripped, and cavity portions 408 areformed in the parts where the dummy gate electrodes 401 n′, 401 p′ havebeen formed. In addition, the silicon oxide layer 405, which has beenformed at each bottom of the dummy gate electrodes 401 n′, 401 p′ isalso stripped. Next, a resist not shown in the figure is selectivelyformed on the P-type MOSFET region of the silicon substrate 100 and thefirst interlayer insulation film 402, and, using this resist and thefirst interlayer insulation film 402 as masks, In⁺ ions, for example,are implanted inside the silicon substrate 100 at the bottom of theN-type MOSFET region cavity portion 408. Then, after removing the resistby ashing, the impurity concentration of the N-type MOSFET channelregion is adjusted by performing heat treatment for a short time at, forexample, 1000° C., adjusting the threshold voltage of the N-type MOSFET.In addition, an ultra-thin gate insulating film 409 is formed on thesilicon substrate 100 at the bottom of the cavity portion 408 using, forexample, plasma oxidation and nitriding.

Next, as shown in FIG. 7E, a 150 nm-thick tungsten layer 401, having awork function of 4.9 eV, is deposited on the gate insulation film 409 byCVD using an organic material as a source. Then, the tungsten layer 401is polished, using, for example, CMP, until the surface of the firstinterlayer insulation film 402 is exposed to form gate electrodes 401 nand 401 p.

Next, as shown in FIG. 7F, a hydrogen-containing passivation layer 118is formed on the surface of the first interlayer insulation film 402 andgate electrode 401 n of the N-type MOSFET formation region, and carbonis eliminated from the tungsten layer 401 n, which constitutes the gateelectrode 401 n, by subjecting the passivation layer 118 to heattreatment in a non-oxidizing environment, such as a nitrogenenvironment, for between 30 minutes and one hour at temperatures, forexample, ranging from around 350° C. to 500° C. This lowers the workfunction of the gate electrode 401 n from 4.9 eV to 4.1 eV. The specificformation method of the passivation layer 118 is the same as that of thefirst embodiment, which has been explained using FIG. 2D.

Next, as shown in FIG. 7G, a second interlayer insulation film 403 isdeposited on the surfaces of the passivation layer 118 and the firstinterlayer insulation film 402 of P-type MOSFET formation region using,for example, CVD, and is planarized by CMP. Next, a contact plug 120 andwiring layer 121 are formed in the same way as in the first embodiment,which has been explained using FIG. 2D. Finally, a third interlayerinsulation film 404 is formed on the second interlayer insulation film403 using, for example, CVD, so as to cover the wiring layer 121, and isplanarized by CMP, thereby completing the semiconductor device shown inFIG. 6.

Thus, in the third embodiment, because the same metal material, forexample, tungsten, is used in the P-type MOSFET gate electrode 401 p andthe N-type MOSFET gate electrode 401 n, and the respective workfunctions are differentiated by changing the concentration of carboncontained in the gate electrodes 401 p, 401 n, it is possible to formmetal gate electrodes having different work functions for the P-typeMOSFET and the N-type MOSFET without significantly increasing the numberof manufacturing processes, in the same way as in the first embodiment.

Furthermore, in the third embodiment, in the same way as in the otherembodiments, the material used in the gate electrodes 401 n, 401 p canbe a metal other than tungsten, or can be an alloy as long as the workfunction of the metal material is 4.8 eV or greater. Also, the gateinsulation film 409 can make use of any insulation film having adielectric constant that is higher than the silicon oxide layer.

Fourth Embodiment

The structure of a semiconductor device in a fourth embodiment of thepresent invention will be explained using FIG. 8. FIG. 8 is a simplifiedcross-sectional view illustrating a structure of a semiconductor devicerelated to the fourth embodiment of the present invention. Since thestructural components other than gate electrodes 501 n and 501 p are thesame as those in the above-mentioned second embodiment, the structuralcomponents in FIG. 8 that are the same as those in FIG. 4 will beassigned the same reference numerals, and explanations thereof will beomitted.

In the above-mentioned second embodiment, the gate electrode 304 isformed by stacking the tungsten layer 301 and the polysilicon layer 302having the nickel silicide layer 303 on its surface, but in the fourthembodiment, a gate electrode 501 is formed by stacking a molybdenum (Mo)layer 502 and a polysilicon layer 302 having a nickel silicide layer 303on its surface. Further, in the fourth embodiment, since a passivationlayer 503 is stripped during the fabrication process, both the N-typeMOSFET and P-type MOSFET, the gate electrode 501, and the gate-sidewallinsulation film 112 are directly covered by a first interlayerinsulation film 119.

Next, the manufacturing process of the above-mentioned semiconductordevice will be explained using FIG. 9A through 9E. FIGS. 9A, 9B, 9C, 9Dand 9E are cross-sectional views illustrating the manufacturingprocesses of a semiconductor device related to the fourth embodiment ofthe present invention.

First, as shown in FIG. 9A, element-separating insulation films 101 athrough 101 c are formed using STI technology in regions other than theelement formation regions on the silicon substrate 100. Then, a p-well102 and an n-well 103 are formed in the regions of the silicon substrate100, where the N-type MOSFET and P-type MOSFET are to be formed. Inaddition, a gate insulation film 104 is formed on the surface of thesilicon substrate 100.

Next, a 10 nm-thick molybdenum layer 502, which has a work function of4.9 eV, is deposited on the gate insulation film 104, for example, byCVD, which makes use of an organic source. A 90 nm-thick polysiliconlayer 302 is deposited on top of the tungsten layer 301, using, forexample, CVD. Then, P⁺ ions, for example, are implanted inside thepolysilicon layer 302 in the P-type MOSFET region, and, B⁺ ions, forexample, are implanted inside the polysilicon layer 302 in the N-typeMOSFET region, after which a 50 nm-thick silicon nitride layer 305 isdeposited by, for example, CVD.

Next, as shown in FIG. 9B, a silicon nitride layer 305, polysiliconlayer 302, and molybdenum layer 502 are subjected to anisotropicetching, thereby forming the gate electrodes 501 n and 501 p of theN-type MOSFET and P-type MOSFET, respectively.

Next, a silicon nitride layer is deposited over the entire surface ofthe silicon substrate 100 by, for example, CVD. Then, a resist not shownin the figure is selectively formed on the silicon nitride layer of theP-type MOSFET region, and, using this resist as a mask, the siliconnitride layer is subjected to anisotropic etching. Next, removing theresist by ashing forms a passivation layer 503 on the surface of thesilicon substrate 100 of the P-type MOSFET formation region, the gateelectrode 501 p, and the gate-sidewall insulation film 112 covering thegate electrode 501 p. In addition, heat treatment is performed forapproximately 30 minutes at a temperature of, for example, about 600° C.to 900° C., in a mixed environment of an oxidizing environment such assteam and a reducing environment such as hydrogen. The ratio of partialpressure of the hydrogen and steam is set at, for example,nitrogen:hydrogen:steam=0.9951:0.040:0.009. That is, the partialpressure ratio of the reducing environment and the oxidizing environmentfor the heat treatment is not such that the molybdenum layer 502 nitself of the gate electrode 501 n is not oxidized but the carboncontained inside the molybdenum layer 502 n is oxide. Furthermore, thetemperature, and the partial pressure ratio of the reducing environmentand oxidizing environment when heat treatment is being performed changein accordance with the type of metal constituting the gate electrodes501 n, 501 p.

Furthermore, in the fourth embodiment, hydrogen and steam are selectedas the combination for the reducing environment and the oxidizingenvironment, but carbon monoxide (CO) can be used as the reducingenvironment, and carbon dioxide (CO2) can be used as the oxidizingenvironment.

The passivation layer 503 comprising a silicon nitride layer serves therole of preventing the hydrogen and steam from penetrated into themolybdenum layer 502 p during the above-mentioned heat treatment.Accordingly, even when the above-mentioned heat treatment is carriedout, the carbon content of the P-type MOSFET molybdenum layer 502 p,which is covered by the passivation layer 503, is not changed, and thework function of the gate electrode 501 p remains 4.9 eV. Conversely,during the above-mentioned heat treatment, the hydrogen and steampenetrate the N-type MOSFET molybdenum layer 502 n, which is not coveredby the passivation layer 503, and the carbon contained inside themolybdenum layer 502 n combines with the steam to form carbon dioxide,and is eliminated. Thus, the concentration of carbon contained insidethe molybdenum layer 502 n is reduced, and the work function of the gateelectrode 501 n decreases from 4.9 eV to 4.1 eV.

Next, as shown in FIG. 9C, the passivation layer 503, which isselectively formed on the P-type MOSFET region, is stripped. There is apossibility that the silicon nitride layer 305 of the gate electrodes501 n, 501 p, which is the same material as the passivation layer 503,will also be stripped at this time, but it does not matter if it isstripped together with the passivation layer 503. Next, As⁺ ions, forexample, are implanted inside the silicon substrate 100 of the N-typeMOSFET region, and, B⁺ ions, for example, are implanted inside thesilicon substrate 100 of the P-type MOSFET region, and shallow diffusionlayers 108 and 109 are formed inside the silicon substrate 100 byapplying heat treatment for five seconds, for example, at a temperatureof 800° C.

Next, as shown in FIG. 9D, a gate-sidewall insulation film 112, whichcomprises a silicon nitride layer 110 and a silicon oxide layer 111, isformed on the respective sidewalls of the respective gate electrodes 501n, 501 p. Further, source/drain diffusion layers 115, 116 are formedrespectively inside the silicon substrate 100 at both sides therespective gate electrodes 501 n, 501 p. The source/drain diffusionlayers 115, 116 are formed from shallow diffusion layers 108, 109 anddeep diffusion layers 113, 114. Nickel silicide layers 117 and 303 areformed in a self-aligning condition on the surfaces of the source/draindiffusion layers 115, 116, and on the surfaces of the polysilicon layers302 n, 302 p. The specific methods for forming the gate-sidewallinsulation film 112, the deep diffusion layers 113, 114, and the nickelsilicide layers 117, 303 are the same as those of the second embodiment,which has been explained using FIG. 5C.

Finally, as shown in FIG. 9E, a first interlayer insulation film 119, acontact plug 120, a wiring layer 121, and a second interlayer insulationfilm 122 are formed in the same way as in the second embodiment, whichhas been explained using FIG. 5E, and the semiconductor device shown inFIG. 8 is completed.

Thus, in the fourth embodiment, the same metal material, for example,molybdenum, is used in the P-type MOSFET gate electrode 501 p and theN-type MOSFET gate electrode 501 n, and the gate electrodes 501 n, 501 puse a stacked structure of a molybdenum layer 502, and a polysiliconlayer 302 having a nickel silicide layer 303 on its surface. This makesit possible to differentiate the respective work functions by adjustingthe amount of carbon contained in the molybdenum layers 502 n, 502 pwithout significantly increasing the number of manufacturing processes,in the same way as in the first embodiment, and, in addition, makes itpossible to lower the resistance of the gate electrodes 501 n, 501 powing to the polysilicon layers 302 n, 302 p having a nickel silicidelayer 303 on their surfaces, in the same way as in the secondembodiment.

Furthermore, in the fourth embodiment, in the same way as in the otherembodiments, the material for the gate electrodes 501 n, 501 p can be ametal other than molybdenum, or can be an alloy as long as the workfunction of the metal material is 4.8 eV or greater. Also, the gateinsulation film 104 can make use of an insulation film having adielectric constant that is higher than the silicon oxide layer.

Further, in the fourth embodiment, the passivation layer 503 is formedprior to the formation of the gate-sidewall insulation film 112, and thework function is lowered by carrying out heat treatment and eliminatingthe carbon from the N-type MOSFET molybdenum layer 502 n, but thepassivation layer 503 can be formed, and heat treatment carried outafter the formation of the gate-sidewall insulation film 112, that is,in the state shown in FIG. 9D. In this case, in order to prevent theflocculation of the nickel silicide layers 117, 303, it is desirablethat heat treatment for eliminating carbon be performed at temperaturesless than 500° C. Further, in this case, since a silicon nitride layerhas properties that prevent the passage of hydrogen and steam, it isdesirable that a layer other than a silicon nitride layer be utilized asthe gate-sidewall insulation film 112.

In addition, in the fourth embodiment, a molybdenum layer 502, which isa metal layer, and a polysilicon layer 302 having a nickel silicidelayer 303 on its surface are stacked to form the gate electrodes 501 n,501 p, but a gate electrode can be constituted using only a metalmaterial in the same way as in the first embodiment.

Further, in the same way as in the third embodiment, a dummy gateelectrode can be formed using a polysilicon layer, and a nickel silicidelayer 117 can be formed on the surfaces of the gate-sidewall insulationfilm 112, and source/drain diffusion layers 115, 116, after which afirst interlayer insulation film can be formed so as to cover thesurface of the dummy gate electrode, and after the dummy gate electrodeis replaced with a metal layer, such as, for example, molybdenum, apassivation layer 503 can be selectively formed on the surface of theN-type MOSFET formation region, and heat treatment can be applied toeliminate carbon. In this case, it is not necessary to strip thepassivation layer 503 subsequent to heat treatment, and after depositinga second interlayer insulation film on the passivation layer 503, awiring layer 121 can be formed as the top layer.

According to the plurality of embodiments described hereinabove, it ispossible to achieve a semiconductor device and a manufacturing methodtherefor, which enables the formation of metal gate electrodes havingdifferent work functions in the P-type MOSFET and N-type MOSFET, withoutsignificantly increasing the number of manufacturing processes.

Having described the embodiments of the invention by referring to theaccompanying drawings, it should be understood that the presentinvention is not limited to those precise embodiments and variouschanges and modifications thereof could be made by one skilled in theart without departing from the spirit or scope of the invention asdefined in the appended claims.

1. A manufacturing method of a semiconductor device on which are formedan N-type MOS transistor and a P-type MOS transistor, the methodcomprising the steps of: forming a gate insulation film on asemiconductor substrate; forming a conductor film, which contains carbonand constitutes a gate electrode, on the gate insulation film inaccordance with a formation method that uses utilizing an organicmaterial; forming an insulation film, which contains hydrogen, so as tocover at least a part of the gate electrode of the N-type MOStransistor; and heating the semiconductor substrate on which theinsulation film is formed in a non-oxidizing environment and reducingthe carbon content of the conductor film of the N-type MOS transistor.2. The manufacturing method of a semiconductor device according to claim1, wherein the amount of hydrogen, which the insulation film contains,is not less than 1E21 cm⁻³.
 3. The manufacturing method of asemiconductor device according to claim 1, wherein the conductor film ofthe N-type MOS transistor is either a metal material with a workfunction of not less than 4.8 eV but less than 5.1 eV, or an alloycomprising a plurality of metal materials with a work function of notless than 4.8 eV but less than 5.1 eV, and the conductor film of theP-type MOS transistor has a work function larger than the work functionof the conductor film of the N-type MOS transistor.
 4. The manufacturingmethod of a semiconductor device according to claim 2, wherein theconductor film of the N-type MOS transistor is either a metal materialwith a work function of not less than 4.8 eV but less than 5.1 eV, or analloy comprising a plurality of metal materials with a work function ofnot less than 4.8 eV but less than 5.1 eV. and the conductor film of theP-type MOS transistor has a work function lamer than the work functionof the conductor film of the N-type MOS transistor.
 5. The manufacturingmethod of a semiconductor device according to claim 1, furthercomprising, subsequent to the step of forming the conductor film, aprocess of forming, on the conductor film, a polysilicon film having ametal silicide layer on the surface thereof.
 6. The manufacturing methodof a semiconductor device according to claim 1, further comprising,prior to the step of forming the gate insulation film, a process offorming an interlayer insulation film having an opening part in the gateelectrode formation region on the semiconductor substrate.